E23 - Test Plan

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GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23

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"Test plans must be structured and clearly show how test cases meet the individual test requirements."

SEMI E23 Parallel IO Test Plan

Type	Test Section	PDF Document
Part #	11105
Description	CCStests E23 PIO Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E23 Parallel IO standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy™ for run-time.
User	Device Manufacturer: Primarily uses CCStests E23 PIO Test Section for source inspection acceptance tests or as part of delivery audit for E23 requirements. Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E23 communication interface. Development Engineers may also utilize this during development integration test phases. Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.
Test Groups	CCStests E23 PIO Test Section contains approximately 30 automated test cases. The following are the test groups for the E23 PIO Test Section.
Group Outline	1. Clear E23 PIO signals 2. Load/Unload Sequences - Valid 2. 1. Load - Single Carrier - Valid (E23) 2. 2. Unload - Single Carrier - Valid (E23) 3. Load/Unload Sequences - Invalid 3. 1. Load - Single Carrier - Pod Placed Before Valid (E23) 3. 2. Load - Single Carrier - Pod Placed Before Ready (E23) 3. 3. Unload - Single Carrier - Pod Removed Before Ready (E23)
Licensing	End-User License Agreement (EULA) required.

Full
Outline

1. TG-6869 Clear E23 PIO signals

1. 1. TC-6870 E23 PIO - Clear all Active signals

2. TG-6871 Load/Unload Sequences - Valid

2. 1. TG-6872 Load - Single Carrier - Valid (E23)

2. 1. 1. TC-6873 AMHS arrives at the Equipment, Asserts E23 VALID signal.

2. 1. 2. TC-6874 Equipment Asserts L_REQ.

2. 1. 3. TC-6875 AMHS Asserts TR_REQ.

2. 1. 4. TC-6876 Equipment Asserts READY.

2. 1. 5. TC-6877 AMHS Asserts BUSY.

2. 1. 6. TC-6878 Equipment senses carrier placement on load port and Drops L_REQ.

2. 1. 7. TC-6879 AMHS Asserts COMPT, Drops TR_REQ and BUSY.

2. 1. 8. TC-6880 Equipment Drops READY.

2. 1. 9. TC-6881 AMHS Drops COMPT and VALID.

2. 2. TG-6883 Unload - Single Carrier - Valid (E23)

2. 2. 1. TC-6884 AMHS arrives at the Equipment, Asserts E23 VALID signal.

2. 2. 2. TC-6885 Equipment Asserts U_REQ.

2. 2. 3. TC-6886 AMHS Asserts TR_REQ.

2. 2. 4. TC-6887 Equipment Asserts READY.

2. 2. 5. TC-6888 AMHS Asserts BUSY.

2. 2. 6. TC-6889 Equipment senses carrier removal from load port and Drops U_REQ.

2. 2. 7. TC-6890 AMHS Asserts COMPT, Drops TR_REQ and BUSY.

2. 2. 8. TC-6891 Equipment Drops READY.

2. 2. 9. TC-6892 AMHS Drops COMPT and VALID.

3. TG-6893 Load/Unload Sequences - Invalid

3. 1. TG-6894 Load - Single Carrier - Pod Placed Before Valid (E23)

3. 1. 1. TC-6909 AMHS arrives at the Equipment, Asserts E23 VALID signal with pod pre-loaded.

3. 1. 2. TC-6896 Equipment does NOT assert L_REQ within timeout. Load sequence aborted.

3. 2. TG-6897 Load - Single Carrier - Pod Placed Before Ready (E23)

3. 2. 1. TC-6873 AMHS arrives at the Equipment, Asserts E23 VALID signal.

3. 2. 2. TC-6899 Equipment Asserts L_REQ (then pod loaded).

3. 2. 3. TC-6875 AMHS Asserts TR_REQ.

3. 2. 4. TC-6901 Equipment does NOT assert READY. Load sequence aborted.

3. 3. TG-6903 Unload - Single Carrier - Pod Removed Before Ready (E23)

3. 3. 1. TC-6884 AMHS arrives at the Equipment, Asserts E23 VALID signal.

3. 3. 2. TC-6908 Equipment Asserts U_REQ (pod then unloaded).

3. 3. 3. TC-6886 AMHS Asserts TR_REQ.

3. 3. 4. TC-6907 Equipment does NOT assert READY. Unload sequence aborted.