Home
Contact Us
Support
Test Plans
GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23
300mm Test Plans
Carrier Management-E87
Processing Management-E40
Control Job Management-E94
Substrate Tracking-E90
Enhanced PIO-E84
Software Products
Testing Services
Certification
"CCS Technology
provides the means for doing the right thing when it comes to equipment certification -
comprehensive testing against specific requirements, rigorously and consistently
applied."
|
SEMI E30 GEM Test Plan
| Type |
Test Section |
PDF Documents |
| Part # |
11102 |
| Description |
CCStests
SEMI E30 GEM Unit Test Section is used to verify requirements and scenarios as
defined by SEMI® in
its Equipment Automation/Software volume for the E30 GEM standard. This test section
contains a set of automated, as well as manual test cases, to create positive and negative
test conditions. Requires CCSenvoy for run-time. |
| User |
Device Manufacturer: Primarily uses CCStests
SEMI E30 GEM Test Section for source inspection acceptance tests or as part of
delivery audit for SEMI E30 GEM requirements.
Equipment Supplier: Used by the Test Engineer who is responsible for supplier
internal system and QA testing of an equipment E30 GEM communication interface.
Development Engineers may also utilize this during development integration test phases.
Systems Integrator: A qualified Systems Integrator engineer would use this test
section as part of the CCSpartner program for performing CCScertify services
or during dry-run and integration tests.
|
| Licensing |
End-User
License Agreement (EULA) required. |
| Summary |
CCStests
SEMI E30 GEM Unit Test Section contains over 200 automated and 20 manual test
cases. These test cases are categorized into over 30 test groups. Report RP-10 Results
GEM Compliance Statement further categorizes the test cases into GEM
capabilities producing a report similar to the SEMI. The following are the test groups for
the SEMI E30 GEM Test Section. |
Group
Outline |
- Fundamental Requirements
- Host-Initiated S1,F13/F14 Scenario
- Control (Operator Initiated)
- On-Line Identification
- Error Messages
- Event Notification
Additional Capabilities
Establish Communications
Dynamic Event Report Configuration
Clock
- Host Instructs Equipment to Set Date/Time
- Equipment Requests Host for Date/Time
Control (Host-Initiated)
Variable Data Collection
Status Data Collection
Equipment Constants
Alarm Management
Enable/Disable Alarms
List Alarms
Alarm Report Send
Process Program Management
Process Program Directory Request
Process Program Change on Equipment
Unformatted Process Program
Unformatted Host Initiated Process Program
Unformatted Equipment Initiated Process Program
Formatted Process Program
Formatted Host Initiated Process Program
Formatted Equipment Initiated Process Program
Process Program Delete
Equipment Terminal Services
Operator Sends Terminal Information
Host Sends Terminal Information - Single Block
Host Sends Terminal Information Equip Does NOT Support Multi-Block
Host Sends Terminal Information Equip Supports Multi-Block
Trace Data Collection
Limits Monitoring
Material Movement
Remote Control
Remote Commands Data Collection
Remote Commands Message Scenarios Tests
Spooling
Spooling Data Collection
Spooling Message Scenario Tests
|
|
|
October 09, 2002
Tel: 802-872-1625 Fax:
802-872-1630
|