E40 Test Plan

Test Plans
GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23

300mm Test Plans
Carrier Management-E87
Processing Management-E40
Control Job Management-E94
Substrate Tracking-E90
Enhanced PIO-E84

Software Products
Testing Services
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"...the Semiconductor industry does little more than unit test equipment with no consistent test plan or process and therefore reporting, analysis and corrective action plans are lacking."

SEMI E40 Processing Management Test Plan

Type	Test Section	PDF Documents
Part #	11107
Description	CCStests E40 Processing Management Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E40 Processing Management standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.
User	Device Manufacturer: Primarily uses CCStests E40 Processing Management Test Section for source inspection acceptance tests or as part of delivery audit for E40 requirements. Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E40 communication interface. Development Engineers may also utilize this during development integration test phases. Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.
Test Groups	CCStests E40 Processing Management Test Section contains an extensive and complete set of automated test cases. The following are the test groups for the E40 Processing Management Test Section.
Licensing	End-User License Agreement (EULA) required.

Group
Outline

1. TG-7320 Test Procedure Setup for E40 Unit Test

2. TG-7324 E40 - Fundamental Requirements

2. 1. TG-7325 E40 - PRJobCommand - Abort

2. 1. 1. TG-7326 Create a single process job and Abort

2. 2. TG-7329 E40 - PRJobCreate - Reject Parameters

2. 2. 1. TG-7330 Reject Invalid\Incomplete Parameters

2. 3. TG-7334 E40 - Process Job Object Implementation

2. 3. 1. TG-7335 E40 - Create Process Job Object

2. 3. 2. TG-7337 E40 - Test Attribute: PRJobState

2. 3. 3. TG-7340 E40 - Test Attribute: PRMtlName

2. 3. 4. TG-7343 E40 - Test Attribute: PRMtlType

2. 3. 5. TG-7346 E40 - Test Attribute: PrProcessStart

2. 3. 6. TG-7349 E40 - Test Attribute: PRRecipeMethod

2. 3. 7. TG-7352 E40 - Test Attribute: RecID

2. 3. 8. TG-7355 E40 - Test Attribute: RecipeVarName

2. 3. 9. TG-7358 E40 - Test Attribute: RecipeVarValue

2. 3.10. TG-7361 E40 - Abort Process Job Object

3. TG-7362 E40 - Fundamental Requirements (Do NOT run if Equipment supports E94 Control Jobs)

3. 1. TG-7363 E40 - Single Process Job Execution

3. 1. 1. TG-7364 Create and execute a single process job, Automatic Start, with Material at Equip

3. 1. 2. TG-7369 Create and execute a single process job, Automatic Start, with Material not at Equip

3. 2. TG-7370 E40 - Process Job Milestones (see Single Process Job Execution)

3. 3. TG-7371 E40 - Process Job Failure Indication (see Abort Command)

3. 4. TG-7372 E40 - Abort Command

3. 4. 1. TG-7373 Create and execute a single process job to Abort during Setup

3. 4. 2. TG-7375 Create and execute a single process job to Abort during Processing

3. 5. TG-7376 E40 - Reject Unsupported Capabilities (not yet supported)

4. TG-7377 E40 - Additional Capabilities

4. 1. TG-7378 E40 - Process Job Queueing

4. 1. 1. TG-7379 Request Process Job Space

4. 1. 2. TG-7381 Create Maximum # of Process Jobs + 1 - Overflow the PJ queue

4. 1. 3. TG-7385 Create and Cancel a Single Process Job

4. 1. 4. TG-7389 Create and Stop a Single Process Job

4. 1. 5. TG-7391 Create and Abort a Single Process Job

4. 1. 6. TG-7392 Create Multiple Process Jobs, then Cancel

5. TG-7399 E40 - Additional Capabilities (Do NOT run if Equipment supports E94 Control Jobs)

5. 1. TG-7400 E40 - Resource Pre-conditioning and Post-conditioning (not yet supported)

5. 2. TG-7401 E40 - Stop, Pause and Resume Commands

5. 2. 1. TG-7402 Create and execute a single process job, attempt PAUSE and RESUME

5. 2. 2. TG-7408 Create, execute, and STOP a single process job

5. 3. TG-7410 E40 - Manual Process Start

5. 3. 1. TG-7411 Create and execute a single process job, Manual Start, with Material already at Equip

5. 3. 2. TG-7414 Create and execute a single process job, Manual Start, with Material not at Equipment

5. 4. TG-7417 E40 - Process Tuning

5. 4. 1. TG-7418 Execute a single process job and change a recipe parameter

5. 5. TG-7420 E40 - Multiple Concurrent Process Jobs

5. 5. 1. TG-7421 Create and execute two concurrent process jobs with Auto Start, separate Loadports

5. 5. 2. TG-7432 Create and execute two concurrent process jobs with Auto Start, one Carrier

5. 6. TG-7434 E40 - Multiple Consecutive Process Jobs

5. 6. 1. TG-7435 Create and execute two consecutive process jobs with Automatic Start

5. 6. 2. TG-7442 Create and execute two duplicate process jobs with Automatic Start

5. 6. 3. TG-7444 Create two consecutive process jobs, one with Automatic Start, one with Manual

5. 7. TG-7446 E40 - Multiple Processes with PRJobMultiCreate

5. 7. 1. TG-7447 E40 - Create and execute a multiple process job with Automatic Start

5. 8. TG-7449 E40 - Processing of Material Groups (see Multiple Concurrent Process Jobs)

5. 9. TG-7450 E40 - Process Material Order

5. 9. 1. TG-7451 Issue Process Mat Order, create Multiple Process Jobs, change Process Mat Order

5.10. TG-7459 E40 - Process Job with no Material (not yet supported)