E87 Test Plan

Test Plans
GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23

300mm Test Plans
Carrier Management-E87
Processing Management-E40
Control Job Management-E94
Substrate Tracking-E90
Enhanced PIO-E84

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"Using traceability techniques, CCSautomation software can be used to trace every requirement to one or more tests, providing a means for verifying that all requirements have been tested."

SEMI E87 Carrier Management Test Plan

Type	Test Section	PDF Document
Part #	11111
Description	CCStests E87 Carrier Management Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E87 Carrier Management standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.
User	Device Manufacturer: Primarily uses CCStests E87 Carrier Management Test Section for source inspection acceptance tests or as part of delivery audit for E87 requirements. Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E87 communication interface. Development Engineers may also utilize this during development integration test phases. Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.
Test Groups	CCStests E87 Carrier Management Test Section contains an extensive and complete set of automated test cases. The following are the test groups for the E87 Carrier Management Test Section.
Licensing	End-User License Agreement (EULA) required.

Group
Outline

1. TG-7320 Test Procedure Setup for E87 Unit Test

2. TG-7323 E87 - Fundamental Requirements

2. 1. TG-7324 E87 - Alarms Implementation

2. 1. 1. TG-7325 E87 Alarm Access Mode Violation

2. 1. 2. TG-7328 E87 Alarm Attempt to Use Out of Service Load Port

2. 1. 3. TG-7331 E87 Alarm Carrier Dock/Undock Failure

2. 1. 4. TG-7334 E87 Alarm Carrier Open/Close Failure

2. 1. 5. TG-7337 E87 Alarm Carrier Placement Error

2. 1. 6. TG-7340 E87 Alarm Carrier Presence Error

2. 1. 7. TG-7343 E87 Alarm Carrier Verification Failure

2. 1. 8. TG-7346 E87 Alarm CarrierID Read Failed

2. 1. 9. TG-7349 E87 Alarm Internal Buffer Carrier Move Failure

2. 1.10. TG-7352 E87 Alarm PIO Failure

2. 1.11. TG-7355 E87 Alarm Slot Map Read Failed

2. 1.12. TG-7358 E87 Alarm Slot Map Verification Failed

2. 1.13. TG-7361 E87 Alarm Duplicate CarrierID

2. 2. TG-7364 E87 - Variable Data Definitions

2. 2. 1. TG-7365 E87 - Status Variable Namelist Request

2. 2. 2. TG-7378 E87 - Status Variable Request

2. 3. TG-7391 E87 - Load Port Numbering (not yet supported)

2. 4. TG-7392 E87 - Carrier Slot Numbering (not yet supported)

2. 5. TG-7393 E87 - Additional Events Implementation

2. 6. TG-7403 E87 - Carrier Object Implementation

2. 6. 1. TG-7404 E87 - Create Carrier Object

2. 6. 2. TG-7406 E87 - Test Attribute: Capacity

2. 6. 3. TG-7409 E87 - Test Attribute: SubstrateCount

2. 6. 4. TG-7412 E87 - Test Attribute: CarrierIDStatus

2. 6. 5. TG-7415 E87 - Test Attribute: CarrierProcessingStatus

2. 6. 6. TG-7418 E87 - Test Attribute: ContentMap

2. 6. 7. TG-7421 E87 - Test Attribute: LocationID

2. 6. 8. TG-7424 E87 - Test Attribute: SlotMap

2. 6. 9. TG-7427 E87 - Test Attribute: SlotMapStatus

2. 6.10. TG-7430 E87 - Test Attribute: Usage

2. 6.11. TG-7433 E87 - Remove Carrier Object

2. 7. TG-7435 E87 - Services Implementation

2. 8. TG-7449 E87 - Carrier ID Verification Support

2. 8. 1. TG-7450 E87 - Carrier ID Verification Support, Host Verification, AUTO DELIVERY

2. 8. 2. TG-7456 E87 - Carrier ID Verification Support, Host Verification, MANUAL DELIVERY

2. 9. TG-7459 E87 - Slot Map Verification Support

2. 9. 1. TG-7460 E87 - Slot Map Verification Support, Host Verification, AUTO DELIVERY

2. 9. 2. TG-7462 E87 - Slot Map Verification Support, Host Verification, MANUAL DELIVERY

2.10. TG-7463 E87 - Load Port Transfer State Model

2.10. 1. TG-7464 E87 - Normal Verifications

2.10. 1. 1. TG-7465 E87 - R1-2 Normal Roundtrip 1 with Fixed Buffer, Host Verification, AUTO

2.10. 1. 2. TG-7468 E87 - R1-2 Normal Roundtrip 1 with Fixed Buffer, Host Verification, MANUAL

2.10. 1. 3. TG-7469 E87 - R1-3 Normal Roundtrip 2 with Fixed Buffer, Equip Verification, AUTO

2.10. 1. 4. TG-7470 E87 - R1-3 Normal Roundtrip 2 with Fixed Buf, Equip Verification, MANUAL

2.10. 1. 5. TG-7471 E87 - R1-4 Normal Roundtrip 3 with Internal Buf, Host Verification, AUTO

2.10. 1. 6. TG-7474 E87 - R1-4 Normal Roundtrip 3 with Internal Buf, Host Verification, MANUAL

2.10. 1. 7. TG-7475 E87 - R1-5 Normal Roundtrip 4 with Internal Buf, Equip Verification, AUTO

2.10. 1. 8. TG-7476 E87 - R1-5 Normal Roundtrip 4 with Internal Buf, Equip Verification, MANUAL

2.10. 2. TG-7477 E87 - Abnormal Verifications

2.10. 2. 1. TG-7478 E87 - R1-6 Abnormal Carrier ID Verification 1, Cancel Carrier, Host Based

2.10. 2. 2. TG-7479 E87 - R1-7 Abnormal Carrier ID Verification 2, Cancel Carrier, Equipment Based

2.10. 2. 3. TG-7481 E87 - R1-8 Abnormal Carrier ID Verification 3, Proceed with Carrier, Equip Based

2.10. 2. 4. TG-7482 E87 - R1-9 Abnormal Slot Map Verif 1, Cancel Carrier, Host Based, Fixed Buf

2.10. 2. 5. TG-7483 E87 - R1-10 Abnormal Slot Map Verif 2, Cancel Carrier, Equip Based, Int Buf

2.10. 3. TG-7485 E87 - Carrier Out Queuing

2.10. 3. 1. TG-7486 E87 - R1-11 Carrier Out Queuing, Host Verification, AUTO DELIVERY

2.10. 3. 2. TG-7494 E87 - R1-11 Carrier Out Queuing, Host Verification, MANUAL DELIVERY

2.10. 3. 3. TG-7495 E87 - R1-12 Carrier Out de-queuing (cancellation), Host Verification, AUTO

2.10. 3. 4. TG-7496 E87 - R1-12 Carrier Out dequeueing (cancellation), Host Verification, MANUAL

2.10. 4. TG-7497 E87 - Error Conditions

2.10. 4. 1. TG-7498 E87 - Auto Access Mode, Manual placement of carrier, host verification

2.10. 4. 2. TG-7500 E87 - Auto Access Mode, Manual placement of carrier, equipment verification

2.10. 4. 3. TG-7501 E87 - Bind, MANUAL DELIVERY, with wrong Carrier ID

2.11. TG-7504 E87 - Load Port/Carrier Association State Model

2.11. 1. TG-7505 E87 - R1-13 Carrier Association Cancellation, equipment verification

3. TG-7506 E87 - Additional Capabilities

3. 1. TG-7507 E87 - Association Visible Signal

3. 1. 1. TG-7508 E87 - Association Visible Signal, Host Verification, MANUAL DELIVERY

3. 1. 2. TG-7511 E87 - Association Visible Signal, Equipment Verification, MANUAL DELIVERY