E90 Test Plan

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GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23

300mm Test Plans
Carrier Management-E87
Processing Management-E40
Control Job Management-E94
Substrate Tracking-E90
Enhanced PIO-E84

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SEMI E90 Substrate Tracking Test Plan

Type	Test Section	PDF Documents
Part #	11108
Description	CCStests E90 Substrate Tracking Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E90 Substrate Tracking standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.
User	Device Manufacturer: Primarily uses CCStests E90 Substrate Tracking Test Section for source inspection acceptance tests or as part of delivery audit for E90 requirements. Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E90 communication interface. Development Engineers may also utilize this during development integration test phases. Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.
Test Groups	CCStests E90 Substrate Tracking Test Section contains an extensive and complete set of automated test cases. The following are the test groups for the E90 Substrate Tracking Test Section.
Licensing	End-User License Agreement (EULA) required.

Group
Outline

1. TG-7320 Test Procedure Setup for E90 Unit Test

2. TG-7323 E90 - Fundamental Requirements

2. 1. TG-7324 E90 - Status Variable Namelist Request

2. 2. TG-7339 E90 - Status Variable Request

2. 3. TG-7354 E90 - Collection Events

2. 4. TG-7358 E90 - Create Substrate and Get Attributes

2. 4. 1. TG-7359 E90 - Create Substrate Object (Register)

2. 4. 2. TG-7361 E90 - Test Attribute: MaterialStatus

2. 4. 3. TG-7364 E90 - Test Attribute: SubstDestination

2. 4. 4. TG-7367 E90 - Test Attribute: SubstHistory

2. 4. 5. TG-7370 E90 - Test Attribute: SubstLocID

2. 4. 6. TG-7373 E90 - Test Attribute: SubstProcState

2. 4. 7. TG-7376 E90 - Test Attribute: SubstSource

2. 4. 8. TG-7379 E90 - Test Attribute: SubstState

2. 4. 9. TG-7382 E90 - Get and Set Attribute: LotID

2. 4.10. TG-7386 E90 - Get and Set Attribute: SubstType

2. 4.11. TG-7390 E90 - Get and Set Attribute: SubstUsage

2. 4.12. TG-7394 E90 - Remove Substrate

2. 5. TG-7396 E90 - Get Substrate Location Object Attributes from Equipment

2. 5. 1. TG-7397 E90 - Test Attributes at E90 Equipment Substrate Loc[0]

2. 5. 1. 1. TG-7398 E90 - Test Attribute: SubstID

2. 5. 1. 2. TG-7400 E90 - Test Attribute: SubstLocState

2. 5. 2. TG-7402 E90 - Test Attributes at E90 Equipment Substrate Loc[1]

2. 5. 2. 1. TG-7403 E90 - Test Attribute: SubstID

2. 5. 2. 2. TG-7405 E90 - Test Attribute: SubstLocState

2. 5. 3. TG-7407 E90 - Test Attributes at E90 Equipment Substrate Loc[2]

2. 5. 3. 1. TG-7408 E90 - Test Attribute: SubstID

2. 5. 3. 2. TG-7410 E90 - Test Attribute: SubstLocState

2. 5. 4. TG-7412 E90 - Test Attributes at E90 Equipment Substrate Loc[3]

2. 5. 4. 1. TG-7413 E90 - Test Attribute: SubstID

2. 5. 4. 2. TG-7415 E90 - Test Attribute: SubstLocState

2. 5. 5. TG-7417 E90 - Test Attributes at E90 Equipment Substrate Loc[4]

2. 5. 5. 1. TG-7418 E90 - Test Attribute: SubstID

2. 5. 5. 2. TG-7420 E90 - Test Attribute: SubstLocState

2. 5. 6. TG-7422 E90 - Test Attributes at E90 Equipment Substrate Loc[5]

2. 5. 6. 1. TG-7423 E90 - Test Attribute: SubstID

2. 5. 6. 2. TG-7425 E90 - Test Attribute: SubstLocState

2. 6. TG-7427 E90 - Create Substrate Location Object (uses E87 Carrier Management)

2. 6. 1. TG-7428 E90 - Normal Roundtrip with Host Verification, AUTO DELIVERY

2. 6. 2. TG-7442 E90 - Normal Roundtrip with Host Verification, MANUAL DELIVERY

2. 6. 3. TG-7445 E90 - Normal Roundtrip with Equipment Verification, AUTO DELIVERY

2. 6. 4. TG-7447 E90 - Normal Roundtrip with Equipment Verification, MANUAL DELIVERY

2. 7. TG-7448 E90 - Change Substrate Location

2. 7. 1. TG-7449 E90 - Create (Register) Substrate Object, Change location, and Remove

3. TG-7455 E90 - Additional Capabilities (none)