E94 Test Plan

Test Plans
GEM-E30 SECSI-E4
HSMS-E37.1 PIO-E23

300mm Test Plans
Carrier Management-E87
Processing Management-E94
Control Job Management-E94
Substrate Tracking-E90
Enhanced PIO-E84

Software Products
Testing Services
Certification

"As equipment automation becomes indispensable and prevalent within the semiconductor manufacturing industry, strict adherence to communication interface standards becomes a requirement."

SEMI E94 Control Job Management Test Plan

Type	Test Section	PDF Documents
Part #	11109
Description	CCStests E94 Control Job Management Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E94 Control Job Management standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.
User	Device Manufacturer: Primarily uses CCStests E94 Control Job Management Test Section for source inspection acceptance tests or as part of delivery audit for E94 requirements. Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E94 communication interface. Development Engineers may also utilize this during development integration test phases. Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.
Test Groups	CCStests E94 Control Job Management Test Section contains an extensive and complete set of automated test cases. The following are the test groups for the E94 Control Job Management Test Section.
Licensing	End-User License Agreement (EULA) required.

Group
Outline

1. TG-7320 Test Procedure Setup for E94 Unit Test

2. TG-7323 E94 - Fundamental Requirements

2. 1. TG-7324 E94 - Status Variable Namelist Request

2. 2. TG-7330 E94 - Status Variable Request

2. 3. TG-7336 E94 - Collection Events

2. 4. TG-7347 E94 - Services Implementation

2. 5. TG-7356 E94 - Control Job Implementation

2. 5. 1. TG-7357 Create Control Job

2. 5. 2. TG-7361 E94 - Test Attribute: PRJobID

2. 5. 3. TG-7364 E94 - Test Attribute: CurrentPRJob

2. 5. 4. TG-7367 E94 - Test Attribute: StartMethod

2. 5. 5. TG-7370 E94 - Test Attribute: State

2. 5. 6. TG-7373 E94 - Get and Set Attribute: DataCollectionPlan

2. 5. 7. TG-7377 E94 - Get and Set Attribute: CarrierInputSpec

2. 5. 8. TG-7381 E94 - Get and Set Attribute: CarrierID

2. 5. 9. TG-7385 E94 - Get and Set Attribute: Destination

2. 5.10. TG-7389 E94 - Get and Set Attribute: MaterialStatus

2. 5.11. TG-7393 E94 - Get and Set Attribute: PauseEvent

2. 5.12. TG-7397 E94 - Get and Set Attribute: OutputRule

2. 5.13. TG-7401 E94 - Get and Set Attribute: ProcessOrderMgmt

2. 5.14. TG-7405 E94 - Get and Set Attribute: RuleName

2. 5.15. TG-7409 E94 - Get and Set Attribute: RuleValue

2. 5.16. TG-7413 E94 - Get and Set Attribute: SubstrateLocation

2. 5.17. TG-7417 Cancel Control Job

2. 6. TG-7419 E94 - Queue Management

2. 6. 1. TG-7420 Request Queue Available Space

2. 6. 2. TG-7423 Create/Cancel Control Job

2. 6. 3. TG-7426 Create/Stop Control Job

2. 6. 4. TG-7429 Create/Abort Control Job

2. 6. 5. TG-7431 Create 3 Control Jobs, move last to HOQ.

2. 6. 6. TG-7440 Create Control Job with Multiple Process Jobs, Cancel Control Job

2. 7. TG-7443 E94 - Error Conditions

2. 7. 1. TG-7444 Create Control Job with No Process Jobs

2. 7. 2. TG-7445 Create Control Job with Manual Process Job, Cancel Control Job

2. 7. 3. TG-7446 Create Control Job with Duplicate Control Job ID

2. 7. 4. TG-7448 Create Maximum # of Control Jobs + 1 - Overflow the CJ queue

3. TG-7451 E94 - Additional Capabilities