|
|
| "Applied Materials CCS
Technology provides the means for doing the right thing when
it comes to equipment certification - comprehensive testing
against specific requirements, rigorously and consistently
applied." |
|
|
|
SEMI E30 GEM Test Plan
| Type |
Test
Section |
PDF
Documents |
| Part
# |
11102 |
| Description |
CCStests
SEMI E30 GEM Unit Test Section is used to verify
requirements and scenarios as defined by SEMI®
in its Equipment Automation/Software volume for the
E30 GEM standard. This test section contains a set
of automated, as well
as manual test cases, to create positive and negative
test conditions.
Requires CCSenvoy for run-time. |
| User |
Device Manufacturer:
Primarily uses CCStests SEMI E30
GEM Test Section for source inspection acceptance
tests or as part of delivery audit for SEMI E30
GEM requirements.
Equipment Supplier:
Used by the Test Engineer who is responsible for
supplier internal system and QA testing of an equipment
E30 GEM communication interface. Development Engineers
may also utilize this during development integration
test phases.
Systems Integrator:
A qualified Systems Integrator engineer would use
this test section as part of the CCSpartner
program for performing CCScertify
services or during dry-run and integration
tests.
|
| Licensing |
End-User
License Agreement (EULA) required. |
| Summary |
CCStests
SEMI E30 GEM Unit Test Section contains over
200 automated and 20 manual test cases. These test
cases are categorized into over 30 test groups. Report
RP-10 Results – GEM Compliance Statement
further categorizes the test cases into GEM capabilities
producing a report similar to the SEMI. The following
are the test groups for the SEMI E30 GEM Test Section. |
Group
Outline |
Fundamental
Requirements
- Host-Initiated
S1,F13/F14 Scenario
- Control
(Operator Initiated)
- On-Line
Identification
- Error
Messages
- Event
Notification
Additional
Capabilities
- Establish
Communications
- Dynamic
Event Report Configuration
- Clock
- Host
Instructs Equipment to Set Date/Time
- Equipment
Requests Host for Date/Time
- Control
(Host-Initiated)
- Variable
Data Collection
- Status
Data Collection
- Equipment
Constants
- Alarm
Management
- Enable/Disable
Alarms
- List
Alarms
- Alarm
Report Send
- Process
Program Management
- Process
Program Directory Request
- Process
Program Change on Equipment
- Unformatted
Process Program
- Unformatted
Host Initiated Process Program
- Unformatted
Equipment Initiated Process Program
- Formatted
Process Program
- Formatted
Host Initiated Process Program
- Formatted
Equipment Initiated Process Program
- Equipment
Terminal Services
- Operator
Sends Terminal Information
- Host
Sends Terminal Information - Single Block
- Host
Sends Terminal Information – Equip Does
NOT Support Multi-Block
- Host
Sends Terminal Information – Equip Supports
Multi-Block
- Trace
Data Collection
- Limits
Monitoring
- Material
Movement
- Remote
Control
- Remote
Commands Data Collection
- Remote
Commands Message Scenarios Tests
- Spooling
- Spooling
Data Collection
- Spooling
Message Scenario Tests
|
|
|
|
|
