|
|
| "...the
Semiconductor industry does little more than unit test equipment
with no consistent test plan or process and therefore reporting,
analysis and corrective action plans are lacking." |
|
|
SEMI
E40 Processing Management Test Plan
| Type |
Test
Section |
PDF
Documents |
| Part
# |
11107 |
| Description |
CCStests
E40 Processing Management Test Section is
used to verify requirements as defined by SEMI®
in its Equipment Automation/Software volume for the
E40 Processing Management standard. This
test section contains a set of automated, as well
as manual test cases, to create positive and negative
test conditions. Requires CCSenvoy
for run-time. |
| User |
Device Manufacturer:
Primarily uses CCStests E40 Processing
Management Test Section for source inspection
acceptance tests or as part of delivery audit for
E40 requirements.
Equipment Supplier:
Used by the Test Engineer who is responsible for supplier
internal system and QA testing of an equipment E40
communication interface. Development Engineers may
also utilize this during development integration test
phases.
Systems Integrator:
A qualified Systems Integrator engineer would use
this test section as part of the CCSpartner
program for performing CCScertify services
or during dry-run and integration tests.
|
| Test
Groups |
CCStests
E40 Processing Management Test Section contains
an extensive and complete set of automated test cases.
The following are the test groups for the E40 Processing
Management Test Section. |
| Licensing |
End-User
License Agreement (EULA) required. |
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