Applied Materials

Test Plan Products

"CCSautomation is a family of certification products and services that provide the means for verifying that specified requirements for a piece of equipment are met."

SEMI E84 Enhanced Parallel IO Test Plan

Type

Test Section

PDF Document

Part #

11106

Description

CCStests E84 EPIO Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E84 Enhanced Parallel IO standard.

This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.

User

Device Manufacturer: Primarily uses CCStests E84 EPIO Test Section for source inspection acceptance tests or as part of delivery audit for E84 requirements.

Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E84 communication interface. Development Engineers may also utilize this during development integration test phases.

Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.

Test Groups

CCStests E84 EPIO Test Section contains approximately 50 automated test cases. The following are the test groups for the E84 EPIO Test Section.

Group Outline

1. TG-7223 Clear E84 EPIO signals

2. TG-7225 Load/Unload Sequences - Valid (E84)

2. 1. TG-7226 Load - Single Carrier - Valid (E84)

2. 2. TG-7237 Unload - Single Carrier - Valid (E84)

2. 3. TG-7237 Continuous Mode - Load/Unload Single Carrier - Valid (E84)

3. TG-7247 Load/Unload Sequences - Invalid (E84)

3. 1. TG-7248 Load - Single Carrier - Pod Placed Before Valid

3. 2. TG-7251 Load - Single Carrier - Pod Placed Before Ready

3. 3. TG-7257 Unload - Single Carrier - Pod Removed Before Ready

Licensing

End-User License Agreement (EULA) required.