|
|
| "CCS
Technology's test plans are unlike common test scripts, which
are highly dependent on the expertise of the engineer that
writes and executes the scripts, and then interprets the results." |
|
|
SEMI
E90 Substrate Tracking Test Plan
| Type |
Test
Section |
PDF
Documents |
| Part
# |
11108 |
| Description |
CCStests
E90 Substrate Tracking Test Section is used
to verify requirements as defined by SEMI®
in its Equipment Automation/Software volume for the
E90 Substrate Tracking standard. This test
section contains a set of automated, as well as manual
test cases, to create positive and negative test conditions.
Requires CCSenvoy for run-time. |
| User |
Device Manufacturer:
Primarily uses CCStests E90 Substrate
Tracking Test Section for source inspection acceptance
tests or as part of delivery audit for E90 requirements.
Equipment Supplier:
Used by the Test Engineer who is responsible for supplier
internal system and QA testing of an equipment E90
communication interface. Development Engineers may
also utilize this during development integration test
phases.
Systems Integrator:
A qualified Systems Integrator engineer would use
this test section as part of the CCSpartner
program for performing CCScertify services
or during dry-run and integration tests.
|
| Test
Groups |
CCStests
E90 Substrate Tracking Test Section contains an extensive
and complete set of automated test cases. The following
are the test groups for the E90 Substrate Tracking
Test Section. |
| Licensing |
End-User
License Agreement (EULA) required. |
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