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"As equipment automation becomes indispensable and prevalent within the semiconductor manufacturing industry, strict adherence to communication interface standards becomes a requirement."

SEMI E94 Control Job Management Test Plan

Type Test Section PDF Documents
Part # 11109
Description CCStests E94 Control Job Management Test Section is used to verify requirements as defined by SEMI® in its Equipment Automation/Software volume for the E94 Control Job Management standard. This test section contains a set of automated, as well as manual test cases, to create positive and negative test conditions. Requires CCSenvoy for run-time.
User

Device Manufacturer: Primarily uses CCStests E94 Control Job Management Test Section for source inspection acceptance tests or as part of delivery audit for E94 requirements.

Equipment Supplier: Used by the Test Engineer who is responsible for supplier internal system and QA testing of an equipment E94 communication interface. Development Engineers may also utilize this during development integration test phases.

Systems Integrator: A qualified Systems Integrator engineer would use this test section as part of the CCSpartner program for performing CCScertify services or during dry-run and integration tests.

Test Groups CCStests E94 Control Job Management Test Section contains an extensive and complete set of automated test cases. The following are the test groups for the E94 Control Job Management Test Section.
Licensing End-User License Agreement (EULA) required.

 



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